Patterning of non-convex shaped nanostructures

Access full-text files

Date

2014-09-09

Authors

Sidlgata V. Sreenivasan
Frank Y. Xu
Byung-Jin Choi
Vikramjit Singh

Journal Title

Journal ISSN

Volume Title

Publisher

United States Patent and Trademark Office

Abstract

Methods of making nano-scale structures with geometric cross-sections, including convex or non-convex cross-sections, are described. The approach may be used to directly pattern substrates and/or create imprint lithography templates or molds that may be subsequently used to directly replicate nano-shaped patterns into other substrates, such as into a functional or sacrificial resist to form functional nanoparticles.

Description

Keywords

LCSH Subject Headings

Citation