Rhodium Pyrazolate Complexes as Potential CVD Precursors
dc.contributor.utaustinauthor | Rivers, Joseph H. | en_US |
dc.contributor.utaustinauthor | Anderson, Lauren J. D. | en_US |
dc.contributor.utaustinauthor | Starr, Cotton M. N. | en_US |
dc.contributor.utaustinauthor | Jones, Richard A. | en_US |
dc.creator | Rivers, Joseph H. | en_US |
dc.creator | Anderson, Lauren J. D. | en_US |
dc.creator | Starr, Cotton M. N. | en_US |
dc.creator | Jones, Richard A. | en_US |
dc.date.accessioned | 2016-09-23T18:05:11Z | |
dc.date.available | 2016-09-23T18:05:11Z | |
dc.date.issued | 2012-02 | en_US |
dc.description.abstract | Reaction of 3,5-(CF3)(2)PzLi with [Rh(mu-Cl)(eta(2)-C2H4)(2)](2) or [Rh(mu-Cl)(PMe3)(2)](2) in Et2O gave the dinuclear complexes [Rh(eta(2)-C2H4)(2)(mu-3,5-(CF3)(2)-Pz)](2) (1) and [Rh-2(mu-Cl)(mu-3,5-(CF3)(2)-Pz) (PMe3)(4)] (2) respectively (3,5-(CF3)(2)Pz = bis-trifluoromethyl pyrazolate). Reaction of PMe3 with [Rh(COD)(mu-3,5-(CF3)(2)-Pz)](2) in toluene gave [Rh(3,5-(CF3)(2)-Pz)(PMe3)(3)] (3). Reaction of 1 and 3 in toluene (1 : 4) gave moderate yields of the dinuclear complex [Rh(PMe3)(2)(mu-3,5-(CF3)(2)-Pz)](2) (4). Reaction of 3,5-(CF3)(2)PzLi with [Rh(PMe3)(4)]Cl in Et2O gave the ionic complex [Rh(PMe3)(4)][3,5-(CF3)(2)-Pz] (5). Two of the complexes, 1 and 3, were studied for use as CVD precursors. Polycrystalline thin films of rhodium (fcc-Rh) and metastable-amorphous films of rhodium phosphide (Rh2P) were grown from 1 and 3 respectively at 170 and 130 degrees C, 0.3 mmHg in a hot wall reactor using Ar as the carrier gas (5 cc min(-1)). Thin films of amorphous rhodium and rhodium phosphide (Rh2P) were grown from 1 and 3 at 170 and 130 degrees C respectively at 0.3 mmHg in a hot wall reactor using H-2 as the carrier gas (7 cc min(-1)). | en_US |
dc.description.department | Chemistry | en_US |
dc.description.sponsorship | Welch Foundation F-816 | en_US |
dc.description.sponsorship | Petroleum Research Fund 47014-ACS | en_US |
dc.description.sponsorship | NSF 0741973 | en_US |
dc.identifier | doi:10.15781/T2NC5SD6F | |
dc.identifier.citation | Rivers, Joseph H., Lauren J. DePue Anderson, Cotton MN Starr, and Richard A. Jones. "Rhodium pyrazolate complexes as potential CVD precursors." Dalton Transactions 41, no. 17 (Feb., 2012): 5401-5408. | en_US |
dc.identifier.doi | 10.1039/c2dt12450e | en_US |
dc.identifier.issn | 1477-9226 | en_US |
dc.identifier.uri | http://hdl.handle.net/2152/41043 | |
dc.language.iso | English | en_US |
dc.relation.ispartof | en_US | |
dc.relation.ispartofserial | Dalton Transactions | en_US |
dc.rights | Administrative deposit of works to Texas ScholarWorks: This works author(s) is or was a University faculty member, student or staff member; this article is already available through open access or the publisher allows a PDF version of the article to be freely posted online. The library makes the deposit as a matter of fair use (for scholarly, educational, and research purposes), and to preserve the work and further secure public access to the works of the University. | en_US |
dc.rights.restriction | Open | en_US |
dc.subject | ray crystal-structures | en_US |
dc.subject | chemical-vapor-deposition | en_US |
dc.subject | thin-films | en_US |
dc.subject | molecular-structure | en_US |
dc.subject | phosphine complexes | en_US |
dc.subject | alloy-films | en_US |
dc.subject | metal | en_US |
dc.subject | ligands | en_US |
dc.subject | rh | en_US |
dc.subject | ruthenium | en_US |
dc.subject | chemistry, inorganic & nuclear | en_US |
dc.title | Rhodium Pyrazolate Complexes as Potential CVD Precursors | en_US |
dc.type | Article | en_US |