Show simple item record

dc.contributor.advisorRaja, Laxminarayan L.en
dc.creatorMin, Timothy T.en
dc.date.accessioned2010-12-20T17:23:54Zen
dc.date.accessioned2010-12-20T17:24:04Zen
dc.date.available2010-12-20T17:23:54Zen
dc.date.available2010-12-20T17:24:04Zen
dc.date.issued2010-08en
dc.date.submittedAugust 2010en
dc.identifier.urihttp://hdl.handle.net/2152/ETD-UT-2010-08-1877en
dc.descriptiontexten
dc.description.abstractA validation study was performed on a capacitively coupled argon discharge to determine the most suitable models for chemistry and electron transport. Chemical reaction rate and electron transport models choices include equilibrium or non-equilibrium electron EDFs. Experimental studies performed by our collaborative partners in the Colorado School of Mines. Conditions for the studies are 138, 315, and 618 mTorr where the cycle averaged power varied at 20, 50, and 80 Watts in which the voltage supply was driven at 13.56 MHz. Simulations were performed using pressures and voltage used in experiments. The most accurate case was for 138 mTorr at 50 Watts using a non-Maxwellian EDF based chemistry (called Bolsig+ chemistry) and a constant electron momentum transfer cross section of 20 Angstroms which was computed from Boeuf’s paper; this model accurately modeled power deposition to within 2.6%. Furthermore, species number densities, electron temperature, and sheath thicknesses are obtained. Using Bolsig+ chemistry resulted in 20,000K higher electron temperatures than using Arrhenius chemistry rates. Results indicate that power deposition occurs due to electrons gaining energy from the sheath which in turn bombard neutral species producing metastable argon.en
dc.format.mimetypeapplication/pdfen
dc.language.isoengen
dc.subjectArgonen
dc.subjectCapacitively coupled plasma dischargeen
dc.subjectModelingen
dc.subjectModelsen
dc.subjectGlow dischargeen
dc.subjectElectron transporten
dc.titleComputational studies of electron transport and reaction rate models for argon plasmaen
dc.date.updated2010-12-20T17:24:04Zen
dc.contributor.committeeMemberHallock, Garyen
dc.description.departmentAerospace Engineering and Engineering Mechanicsen
dc.type.genrethesisen
thesis.degree.departmentAerospace Engineering and Engineering Mechanicsen
thesis.degree.disciplineAerospace Engineeringen
thesis.degree.grantorUniversity of Texas at Austinen
thesis.degree.levelMastersen
thesis.degree.nameMaster of Science in Engineeringen


Files in this item

Icon

This item appears in the following Collection(s)

Show simple item record