System for creating a turbulent flow of fluid between a mold and a substrate

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Date

2007-09-18

Authors

Nicholas A. Stacey
Daniel A. Babbs
Ronald D. Voisin
Duane J. Voth
Frank Y. Xu
Pankaj B. Lad
Ian McMackin
Van N. Truskett
Mathew P. Watts

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United States Patent and Trademark Office

Abstract

The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.

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