Device for holding a template for use in imprint lithography
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Date
2011-10-11
Authors
Carlton Willson
John G. Ekerdt
Sidlgata V. Sreenivasan
Matthew E. Colburn
Byung-Jin Choi
Todd C. Bailey
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.