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    Device for holding a template for use in imprint lithography

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    US8033814.pdf (3.910Mb)
    Date
    2011-10-11
    Author
    Carlton Willson
    John G. Ekerdt
    Sidlgata V. Sreenivasan
    Matthew E. Colburn
    Byung-Jin Choi
    Todd C. Bailey
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    Abstract
    An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.
    Department
    Board of Regents, University of Texas System
    URI
    https://hdl.handle.net/2152/77065
    http://dx.doi.org/10.26153/tsw/4154
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    © The University of Texas at Austin