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dc.creatorSidlgata V. Sreenivasan
dc.creatorMahadevan GanapathiSubramanian
dc.date.accessioned2019-10-23T19:26:45Z
dc.date.available2019-10-23T19:26:45Z
dc.date.issued2007-12-11
dc.identifier.urihttps://hdl.handle.net/2152/76871
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3960
dc.description.abstractThe present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a plurality of piezo pins and reference pins, with the piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins. These and other embodiments are discussed more fully below.
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.titleAdaptive shape substrate support system
dc.typePatent
dc.description.departmentBoard of Regents, University of Texas System
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.date.filed2005-05-25
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F7/707
dc.identifier.patentnumber7307697
dc.identifier.applicationnumber11136891
dc.subject.uspc269/21
dc.subject.uspc355/73
dc.subject.uspc355/53
dc.subject.uspc355/72


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