Method of aligning a template with a substrate employing moire patterns
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Date
2006-01-17
Authors
Sidlgata V. Sreenivasan
Matthew E. Colburn
Todd Bailey
Byung J. Choi
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.