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dc.creatorSidlgata V. Sreenivasan
dc.creatorMatthew E. Colburn
dc.creatorTodd Bailey
dc.creatorByung J. Choi
dc.date.accessioned2019-10-23T19:26:21Z
dc.date.available2019-10-23T19:26:21Z
dc.date.issued2005-06-07
dc.identifier.urihttps://hdl.handle.net/2152/76823
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3912
dc.description.abstractThe present invention includes a method of determining a relative position of a substrate and a template spaced-apart therefrom, the substrate having substrate alignment marks disposed thereon and the template having template alignment marks disposed thereon, the method including, impinging first and second fluxes of light upon the substrate and template alignment marks, with the substrate and template alignment marks being responsive to the first flux of light defining a first response, and being responsive to the second flux of light defining a second response differing from the first response; and processing the first and second responses to form a focused image of the substrate and template alignment marks on a common plane, with the focused image indicating the relative position of the substrate and the template.
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.titleDual wavelength method of determining a relative position of a substrate and a template
dc.typePatent
dc.description.departmentBoard of Regents, University of Texas System
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.date.filed2004-05-11
dc.subject.cpcB29C35/0888
dc.subject.cpcB29C37/0053
dc.subject.cpcB29C43/003
dc.subject.cpcB29C43/021
dc.subject.cpcB29C2035/0827
dc.subject.cpcB29C2043/025
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F9/00
dc.subject.cpcY10S101/36
dc.subject.cpcY10T428/24802
dc.identifier.patentnumber6902853
dc.identifier.applicationnumber10843195
dc.subject.uspc356/399
dc.subject.uspc356/400
dc.subject.uspc356/401
dc.subject.uspc430/22
dc.subject.uspc430/30


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