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dc.creatorJohn G. Ekerdt
dc.creatorC. Grant Willson
dc.creatorMatthew E. Colburn
dc.creatorTodd Bailey
dc.creatorByung J. Choi
dc.creatorS. V. Sreenivasan
dc.date.accessioned2019-10-23T19:26:06Z
dc.date.available2019-10-23T19:26:06Z
dc.date.issued2004-02-24
dc.identifier.urihttps://hdl.handle.net/2152/76795
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3884
dc.description.abstractDescribed are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.titleTemplate for room temperature, low pressure micro-and nano-imprint lithography
dc.typePatent
dc.description.departmentBoard of Regents, University of Texas System
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.date.filed2001-10-12
dc.subject.cpcB29C35/0888
dc.subject.cpcB29C37/0053
dc.subject.cpcB29C43/003
dc.subject.cpcB29C2035/0827
dc.subject.cpcB29C2043/025
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F9/00
dc.subject.cpcG11B5/855
dc.subject.cpcY10S977/887
dc.identifier.patentnumber6696220
dc.identifier.applicationnumber9976681
dc.subject.uspc101/473
dc.subject.uspc425/385
dc.subject.uspc425/403
dc.subject.uspc430/275.1
dc.subject.uspc430/302
dc.subject.uspc430/320
dc.subject.uspc977/887


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