Using chemical vapor deposited films to control domain orientation in block copolymer thin films

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Date

2015-05-26

Authors

Willson, C. Grant
Seshimo, Takehiro
Durand, William J.
Ellison, Christopher John
Bates, Christopher M.
Cushen, Julia
Santos, Logan J.
Dean, Leon
Rausch, Erica L.

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United States Patent and Trademark Office

Abstract

Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.

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