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    Functional nanoparticles

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    US8961800.pdf (1.151Mb)
    Date
    2015-02-24
    Author
    Sidlgata V. Sreenivasan
    Frank Y. Xu
    Vikramjit Singh
    Shuqiang Yang
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    Abstract
    Functional nanoparticles may be formed using at least one nano-lithography step. In one embodiment, sacrificial material may be patterned on a multi-layer substrate using an imprint lithography system. The pattern may be further etched into the multi-layer substrate. Functional material may then be deposited on multi-layer substrate and solidified. At least a portion of the functional material may then be removed to provide a crown surface exposing pillars. Pillars may be removed from multi-layer substrate forming functional nanoparticles.
    Department
    Board of Regents, University of Texas System
    URI
    https://hdl.handle.net/2152/76648
    http://dx.doi.org/10.26153/tsw/3737
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