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dc.creatorMartinez, Victor Manuelen_US
dc.date.accessioned2008-08-28T21:33:55Z
dc.date.available2008-08-28T21:33:55Z
dc.date.created2002en_US
dc.date.issued2008-08-28T21:33:55Z
dc.identifierb57157182en_US
dc.identifier.urihttp://hdl.handle.net/2152/757
dc.descriptiontext
dc.description.abstractNot availableen_US
dc.format.mediumelectronicen_US
dc.language.isoengen_US
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en_US
dc.subject.lcshSemiconductors--Design and constructionen_US
dc.subject.lcshSemiconductor industry--Production controlen_US
dc.subject.lcshElectronic packagingen_US
dc.subject.lcshProduction managementen_US
dc.titleAdaptive run-to-run control of overlay in semiconductor manufacturingen_US
dc.description.departmentChemical Engineeringen_US
dc.identifier.oclc56799217en_US
dc.identifier.proqst3110651en_US
dc.type.genreThesisen_US
thesis.degree.departmentChemical Engineeringen_US
thesis.degree.disciplineChemical Engineeringen_US
thesis.degree.grantorThe University of Texas at Austinen_US
thesis.degree.levelDoctoralen_US
thesis.degree.nameDoctor of Philosophyen_US


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