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dc.contributor.advisorEdgar, Thomas F.en
dc.creatorMartinez, Victor Manuelen
dc.date.accessioned2008-08-28T21:33:55Zen
dc.date.available2008-08-28T21:33:55Zen
dc.date.issued2002en
dc.identifierb57157182en
dc.identifier.urihttp://hdl.handle.net/2152/757en
dc.descriptiontexten
dc.format.mediumelectronicen
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subject.lcshSemiconductors--Design and constructionen
dc.subject.lcshSemiconductor industry--Production controlen
dc.subject.lcshElectronic packagingen
dc.subject.lcshProduction managementen
dc.titleAdaptive run-to-run control of overlay in semiconductor manufacturingen
dc.description.departmentChemical Engineeringen
dc.identifier.oclc56799217en
dc.identifier.proqst3110651en
dc.type.genreThesisen
thesis.degree.departmentChemical Engineeringen
thesis.degree.disciplineChemical Engineeringen
thesis.degree.grantorThe University of Texas at Austinen
thesis.degree.levelDoctoralen
thesis.degree.nameDoctor of Philosophyen


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