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Anhydride copolymer top coats for orientation control of thin film block copolymers
(United States Patent and Trademark Office, 2015-10-13)
Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous ...
Methods for fabricating nano and microparticles for drug delivery
(United States Patent and Trademark Office, 2015-11-10)
The present invention generally relates to stimuli-responsive drug carriers and methods for making. More specifically, the present invention relates to stimuli-responsive lidded particles that respond to a physiological ...
Polylactide/silicon-containing block copolymers for nanolithography
(United States Patent and Trademark Office, 2017-12-05)
The present invention includes a diblock copolymer system that self-assembles at very low molecular weights to form very small features. In one embodiment, one polymer in the block copolymer contains silicon, and the other ...
Anhydride copolymer top coats for orientation control of thin film block copolymers
(United States Patent and Trademark Office, 2016-04-19)
The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae ...
Method for creating topographical patterns in polymers via surface energy patterned films and the marangoni effect
(United States Patent and Trademark Office, 2017-10-31)
Using a broadband light source and a photomask, surface energy gradients can be directly transferred into polymer films. The Marangoni effect causes high surface energy regions to rise upon heating the film. This leads to ...
Fabricating large area multi-tier nanostructures
(United States Patent and Trademark Office, 2018-04-10)
Methods for fabricating and replicating self-aligned multi-tier nanoscale structures for a variety of cross-sectional geometries. These methods can utilize a single lithography step whereby the need for alignment and overlay ...
Polylactide/silicon-containing block copolymers for nanolithography
(United States Patent and Trademark Office, 2015-09-01)
A diblock copolymer system that self-assembles at very low molecular weights to form very small features is described. One polymer in the block copolymer contains silicon, and the other polymer is a polylactide. The block ...
Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy
(United States Patent and Trademark Office, 2017-08-01)
An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate is ...
Method of automatic fluid dispensing for imprint lithography processes
(United States Patent and Trademark Office, 2015-12-29)
Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing ...
Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy
(United States Patent and Trademark Office, 2016-08-16)
An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate ...