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Polylactide/silicon-containing block copolymers for nanolithography
(United States Patent and Trademark Office, 2017-12-05)
The present invention includes a diblock copolymer system that self-assembles at very low molecular weights to form very small features. In one embodiment, one polymer in the block copolymer contains silicon, and the other ...
Ordering block copolymers
(United States Patent and Trademark Office, 2017-11-21)
A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second ...
Ordering block copolymers
(United States Patent and Trademark Office, 2017-01-31)
A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second ...