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    Anhydride copolymer top coats for orientation control of thin film block copolymers 

    Carlton Willson; Takehiro Seshimo; Christopher John Ellison; Christopher M. Bates; Julia Cushen; Logan J. Santos; Leon Dean; Erica L. Rausch (United States Patent and Trademark Office, 2015-10-13)
    Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous ...
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    Polylactide/silicon-containing block copolymers for nanolithography 

    Carlton Willson; Christopher John Ellison; Christopher M. Bates; Julia Cushen (United States Patent and Trademark Office, 2017-12-05)
    The present invention includes a diblock copolymer system that self-assembles at very low molecular weights to form very small features. In one embodiment, one polymer in the block copolymer contains silicon, and the other ...
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    Anhydride copolymer top coats for orientation control of thin film block copolymers 

    Carlton Willson; Takehiro Seshimo; Christopher John Ellison; Christopher M. Bates; Julia Cushen; Logan J. Santos; Leon Dean; Erica L. Rausch; Michael Maher (United States Patent and Trademark Office, 2016-04-19)
    The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae ...
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    Polylactide/silicon-containing block copolymers for nanolithography 

    Carlton Willson; Christopher John Ellison; Christopher M. Bates; Julia Cushen (United States Patent and Trademark Office, 2015-09-01)
    A diblock copolymer system that self-assembles at very low molecular weights to form very small features is described. One polymer in the block copolymer contains silicon, and the other polymer is a polylactide. The block ...
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    Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy 

    Lawrence R. Dunn; Sidlgata V. Sreenivasan; Shrawan Singhal; Ovadia Abed (United States Patent and Trademark Office, 2017-08-01)
    An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate is ...
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    Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy 

    Sidlgata V. Sreenivasan; Shrawan Singhal (United States Patent and Trademark Office, 2016-08-16)
    An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate ...

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    AuthorCarlton Willson (4)Christopher John Ellison (4)Christopher M. Bates (4)Julia Cushen (4)Erica L. Rausch (2)Leon Dean (2)Logan J. Santos (2)Shrawan Singhal (2)Sidlgata V. Sreenivasan (2)Takehiro Seshimo (2)... View MoreSubject
    B05D5/00 (6)
    B82Y40/00 (6)G03F7/0002 (6)
    No longer published (6)
    B05D1/005 (4)B82Y10/00 (4)C09D167/00 (3)B05C21/005 (2)B05D1/02 (2)B05D1/40 (2)... View MoreDate Issued2015 (2)2016 (2)2017 (2)DepartmentBoard of Regents, University of Texas System (6)Has File(s)Yes (6)

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