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Anhydride copolymer top coats for orientation control of thin film block copolymers
(United States Patent and Trademark Office, 2015-10-13)
Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous ...
Polylactide/silicon-containing block copolymers for nanolithography
(United States Patent and Trademark Office, 2017-12-05)
The present invention includes a diblock copolymer system that self-assembles at very low molecular weights to form very small features. In one embodiment, one polymer in the block copolymer contains silicon, and the other ...
Anhydride copolymer top coats for orientation control of thin film block copolymers
(United States Patent and Trademark Office, 2016-04-19)
The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae ...
Polylactide/silicon-containing block copolymers for nanolithography
(United States Patent and Trademark Office, 2015-09-01)
A diblock copolymer system that self-assembles at very low molecular weights to form very small features is described. One polymer in the block copolymer contains silicon, and the other polymer is a polylactide. The block ...
Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy
(United States Patent and Trademark Office, 2017-08-01)
An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate is ...
Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy
(United States Patent and Trademark Office, 2016-08-16)
An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate ...