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Now showing items 1-10 of 10
Method to control the relative position between a body and a surface
(United States Patent and Trademark Office, 2005-10-18)
A method to control a relative position between a surface and a body to form a pattern in the surface that features moving a body to obtain a desired relationship between the surface and the body. To that end, the method ...
Apparatus to control displacement of a body spaced-apart from a surface
(United States Patent and Trademark Office, 2006-08-29)
An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of ...
Remote center compliant flexure device
(United States Patent and Trademark Office, 2008-10-07)
An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of ...
High precision orientation alignment and gap control stages for imprint lithography processes
(United States Patent and Trademark Office, 2005-03-29)
Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of ...
Apparatus to orientate a body with respect to a surface
(United States Patent and Trademark Office, 2005-08-02)
An apparatus to orientate a body with respect to a surface spaced-apart from the body. The apparatus comprises a flexure system having a first flexure member defining a first axis of rotation and a second flexure member ...
Method of orientating a template with respect to a substrate in response to a force exerted on the template
(United States Patent and Trademark Office, 2006-06-13)
The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template ...
Apparatus to control displacement of a body spaced-apart from a surface
(United States Patent and Trademark Office, 2008-05-20)
An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of ...
Method of separating a template from a substrate during imprint lithography
(United States Patent and Trademark Office, 2005-03-22)
Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of ...
Remote center compliant flexure device
(United States Patent and Trademark Office, 2010-04-20)
An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of ...
Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing
(United States Patent and Trademark Office, 2010-04-06)
In some embodiments, the present invention is directed to methods that involve the combination of step-and-flash imprint lithography (SFIL) with a multi-tier template to simultaneously pattern multiple levels of, for ...