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System for creating a turbulent flow of fluid between a mold and a substrate
(United States Patent and Trademark Office, 2007-09-18)
The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and ...
Method to reduce adhesion between a conformable region and a pattern of a mold
(United States Patent and Trademark Office, 2007-01-02)
The present invention provides a method to reduce adhesion between a conformable region on a substrate and a pattern of a mold, which selectively comes into contact with the conformable region. The method features forming ...
Compositions for dark-field polymerization and method of using the same for imprint lithography processes
(United States Patent and Trademark Office, 2011-03-15)
The present invention provides a composition and a method of using the same to form a pattern on a substrate using imprint lithography employing dark-field polymerization. To that end, the composition includes a bis vinyl ...
Method of creating a turbulent flow of fluid between a mold and a substrate
(United States Patent and Trademark Office, 2009-05-12)
The present invention is directed toward a method of controlling a turbulent flow of a fluid between a substrate and a template, and more specifically, controlling a turbulent flow of a fluid between droplets disposed on ...
Methods for fabricating patterned features utilizing imprint lithography
(United States Patent and Trademark Office, 2006-10-17)
One embodiment of the present invention is a method for generating patterned features on a substrate that includes: (a) forming a first layer on at least a portion of a surface of the substrate, the first layer comprising ...
Materials for imprint lithography
(United States Patent and Trademark Office, 2011-12-13)
The present invention is directed to a material for use in imprint lithography that features a composition having a viscosity associated therewith and including a surfactant, a polymerizable component, and an initiator ...