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Anhydride copolymer top coats for orientation control of thin film block copolymers
(United States Patent and Trademark Office, 2015-10-13)
Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous ...
Anhydride copolymer top coats for orientation control of thin film block copolymers
(United States Patent and Trademark Office, 2016-04-19)
The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae ...