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    Anhydride copolymer top coats for orientation control of thin film block copolymers 

    Carlton Willson; Takehiro Seshimo; Christopher John Ellison; Christopher M. Bates; Julia Cushen; Logan J. Santos; Leon Dean; Erica L. Rausch (United States Patent and Trademark Office, 2015-10-13)
    Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous ...
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    Anhydride copolymer top coats for orientation control of thin film block copolymers 

    Carlton Willson; Takehiro Seshimo; Christopher John Ellison; Christopher M. Bates; Julia Cushen; Logan J. Santos; Leon Dean; Erica L. Rausch; Michael Maher (United States Patent and Trademark Office, 2016-04-19)
    The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae ...

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    AuthorCarlton Willson (2)Christopher John Ellison (2)
    Christopher M. Bates (2)
    Erica L. Rausch (2)Julia Cushen (2)
    Leon Dean (2)
    Logan J. Santos (2)Takehiro Seshimo (2)Michael Maher (1)SubjectB05D1/005 (2)B05D2252/02 (2)B05D5/00 (2)B05D7/52 (2)B05D7/56 (2)B81C1/00031 (2)B81C2201/0149 (2)B82Y10/00 (2)B82Y40/00 (2)C09D137/00 (2)... View MoreDate Issued2015 (1)2016 (1)Department
    Board of Regents, University of Texas System (2)
    Has File(s)Yes (2)

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