Now showing items 1-5 of 5
Method to control the relative position between a body and a surface
(United States Patent and Trademark Office, 2005-10-18)
A method to control a relative position between a surface and a body to form a pattern in the surface that features moving a body to obtain a desired relationship between the surface and the body. To that end, the method ...
Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks
(United States Patent and Trademark Office, 2007-12-04)
The present invention includes an imprint lithography system for impinging a flux of light upon a liquid to polymerize the liquid, the system including, a source of light producing the flux of light; and a template having ...
Method of determining alignment of a template and a substrate having a liquid disposed therebetween
(United States Patent and Trademark Office, 2007-03-06)
The present invention includes a method of aligning a substrate and a template spaced-apart from the substrate with an activating light curable liquid disposed therebetween, the substrate having substrate alignment marks ...
Method of orientating a template with respect to a substrate in response to a force exerted on the template
(United States Patent and Trademark Office, 2006-06-13)
The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template ...
Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques
(United States Patent and Trademark Office, 2010-08-03)
The present invention is directed towards a method for determining deformation parameters that a patterned device would undergo to minimize dimensional variations between a recorded pattern thereon and a reference pattern, ...