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Imprint lithography template having a feature size under 250 nm
(United States Patent and Trademark Office, 2007-06-12)
The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality ...
Device for holding a template for use in imprint lithography
(United States Patent and Trademark Office, 2010-05-04)
Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the ...
Real time imprint process diagnostics for defects
(United States Patent and Trademark Office, 2010-10-19)
Defects and/or particles during an imprint lithography process may provide exclusion zones and/or transition zones in the patterned layer. Exclusion zones and/or transition zones in the patterned layer may be identified ...
Large area roll-to-roll imprint lithography
(United States Patent and Trademark Office, 2012-05-29)
Droplets of polymerizable material may be patterned on a film sheet. The droplets of polymerizable material may be dispensed on the film sheet. A pre-determined force may be applied to an imprint lithography template such ...
Device for holding a template for use in imprint lithography
(United States Patent and Trademark Office, 2011-10-11)
An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include ...