Now showing items 11-13 of 13
Imprint lithography template having a feature size under 250 nm
(United States Patent and Trademark Office, 2007-06-12)
The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality ...
Device for holding a template for use in imprint lithography
(United States Patent and Trademark Office, 2010-05-04)
Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the ...
High resolution overlay alignment systems for imprint lithography
(United States Patent and Trademark Office, 2005-07-19)
A system of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed ...