The LMP Process: Layered Metal Prototyping of Titanium from Condensed Thin-Films for Microelectromechanical Devices

Layered prototyping of three-dimensional titanium micromechanical components was demonstrated using selected area laser photolysis of liquid-phase organo-metallic and metal halide thin films. Scanning KrF and XeF excimer lasers were employed at 248 and 351 nm, respectively, generating solid titanium traces from condensed precursor films. Multiple layers were patterned to produce high-aspect ratio titanium lines. Laser pulse repetition rate, scan rate, pulse energy, and layer thickness were related to the resulting layer topography. This process is a first step toward layered metal rapid prototyping ofelectronic packaging microstructures and microelectromechanical systems.