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Gas Phase SFF Control System for Silicon Nitride Deposition by SALD/SALDV
(1997)
: A closed-loop laser scanning and temperature control system has been developed for
SALD/SALDVI. Temperature control is especially important in SALD/SALDVI because
temperature plays a defining role in both composition ...
Fabrication of In-situ SiC/C Thermocouples by Selective Area Laser Deposition
(1997)
With the intrinsic nature to process relatively small features, selective area laser
deposition (SALD) is a potential technique to fabricate complex shaped macro-components with
in-situ high-resolution micro-devices. In ...
SALDVI Optimization for the Tetramethylsilane - Silicon Carbide System
(1997)
Selective Area Laser Deposition Vapor Infiltration (SALDVI) ofsilicon carbide powder
infiltrated with silicon carbide deposited from tetramethylsilane (TMS) was studied. The effects
of deposition time, temperature, and ...