TexasScholarWorks
    • Login
    • Submit
    View Item 
    •   Repository Home
    • UT Electronic Theses and Dissertations
    • UT Electronic Theses and Dissertations
    • View Item
    • Repository Home
    • UT Electronic Theses and Dissertations
    • UT Electronic Theses and Dissertations
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Graphene and MoS2 devices for wafer-scale integrated silicon nanotechnology

    Thumbnail
    View/Open
    RAHIMI-DISSERTATION-2015.pdf (2.898Mb)
    Date
    2015-08
    Author
    Rahimi, Somayyeh
    0000-0002-6397-8706
    Share
     Facebook
     Twitter
     LinkedIn
    Metadata
    Show full item record
    Abstract
    The largest applications of layered two-dimensional (2D) materials such as graphene and transition metal dichalcogenides (TMDs) will likely be realized when combined with ubiquitous Si very large scale integrated (VLSI) technology. The two grand challenges to realize this goal are wafer-scalable device development which preserves the high performance of mechanically-exfoliated 2D films, and integration of 2D materials onto Si CMOS via scalable bonding transfer. To address the first challenge, we investigate the scalable growth of polycrystalline graphene and MoS2 through chemical vapor deposition (CVD) and their integration with Si VLSI technology. Material characterization techniques (STM, XTEM and XRD) are used to investigate the quality of the grown graphene film. The uniformity of the grown film is probed through large-area Raman mapping on 150 and 300 mm Si substrates and reveals > 95% monolayer uniformity with negligible defects. The electrical properties of the grown film on 100 mm substrate are investigated by transferring it to a target Si substrate. About 26,000 graphene field-effect transistors (GFETs) were realized by conventional Si-CMOS compatible fabrication method. The field-effect mobility, sheet and contact resistance are investigated on a statistically large number of devices chosen randomly. Intrinsic graphene features such as soft current saturation, three-region output characteristics at high electric field and frequency doubler and amplifiers are observed on the wafer-scale. Our growth and transport results on scalable CVD graphene have enabled 300 mm synthesis instrumentation that is now commercially available. Using similar growth and development mechanisms, we investigated the large-area growth of monolayer MoS2 on Si platform and probed the electrical properties of the film by using a platform of back-gated field-effect transistors (FET). To address the second grand challenge, we developed a novel method for mechanical delamination of graphene onto an arbitrary target substrate that potentially can be scaled up to wafer-scale. Large area and high quality graphene synthesized on Cu film, using the above-mentioned process, is transferred to a Si substrate using a novel direct mechanical delamination process based on fracture mechanics. The electrical characterization of the transferred film indicates the good quality of the mechanically delaminated graphene and holds great promise for the future integration of 2D materials with Si-CMOS.
    Department
    Electrical and Computer Engineering
    Description
    text
    Subject
    Two-dimensional solids
    Integrated silicon technology
    URI
    http://hdl.handle.net/2152/31378
    Collections
    • UT Electronic Theses and Dissertations

    University of Texas at Austin Libraries
    • facebook
    • twitter
    • instagram
    • youtube
    • CONTACT US
    • MAPS & DIRECTIONS
    • JOB OPPORTUNITIES
    • UT Austin Home
    • Emergency Information
    • Site Policies
    • Web Accessibility Policy
    • Web Privacy Policy
    • Adobe Reader
    Subscribe to our NewsletterGive to the Libraries

    © The University of Texas at Austin

     

     

    Browse

    Entire RepositoryCommunities & CollectionsDate IssuedAuthorsTitlesSubjectsDepartmentsThis CollectionDate IssuedAuthorsTitlesSubjectsDepartments

    My Account

    Login

    Statistics

    View Usage Statistics

    Information

    About Contact Policies Getting Started Glossary Help FAQs

    University of Texas at Austin Libraries
    • facebook
    • twitter
    • instagram
    • youtube
    • CONTACT US
    • MAPS & DIRECTIONS
    • JOB OPPORTUNITIES
    • UT Austin Home
    • Emergency Information
    • Site Policies
    • Web Accessibility Policy
    • Web Privacy Policy
    • Adobe Reader
    Subscribe to our NewsletterGive to the Libraries

    © The University of Texas at Austin