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dc.contributor.advisor​Willson, C. Grant, 1939-
dc.creatorChen, Christopher Hanchengen
dc.date.accessioned2013-10-08T16:06:14Zen
dc.date.issued2013-08en
dc.date.submittedAugust 2013en
dc.identifier.urihttp://hdl.handle.net/2152/21487en
dc.descriptiontexten
dc.description.abstractBlock copolymer self-assembly has demonstrated sub-optical lithographic resolution . High values of chi, the block copolymer interaction parameter, are required to achieve next-generation lithographic resolution . Unfortunately, high values of chi can lead to thin film orientation control difficulties , which are believed to be caused by large differences in the surface energy of each block relative to the substrate and the free surface. The substrate-block interface can be modified to achieve a surface energy intermediate to that of each individual block ; the air-polymer interface, however, presents additional complications. This thesis describes the synthesis of polymers for top coat surface treatments, which are designed to modify the surface energy of the air-block copolymer interface and enable block copolymer orientation control upon thermal annealing. Polymers with β-keto acid functionality were synthesized to allow polarity switching upon decarboxylation. Syntheses of anhydride containing polymers were established that provide another class of polarity switching materials.en
dc.format.mimetypeapplication/pdfen
dc.language.isoen_USen
dc.subjectBlock copolymeren
dc.subjectSurface treatmentsen
dc.subjectDirected self assemblyen
dc.subjectPolymer synthesisen
dc.subjectMonomer synthesisen
dc.subjectMetal-catalyzed addition polymerizationen
dc.subjectRing opening metathesis polymerizationen
dc.subjectDecarboxylationen
dc.subjectMoore's Lawen
dc.subjecten
dc.titleSynthesis of top coat surface treatments for the orientation of thin film block copolymersen
dc.date.updated2013-10-08T16:06:14Zen
dc.description.departmentChemistryen
thesis.degree.departmentChemistryen
thesis.degree.disciplineChemistryen
thesis.degree.grantorThe University of Texas at Austinen
thesis.degree.levelMastersen
thesis.degree.nameMaster of Artsen


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