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dc.contributor.advisorEdgar, Thomas F.en
dc.creatorPasadyn, Alexander James, 1975-en
dc.date.accessioned2011-03-30T21:11:44Zen
dc.date.available2011-03-30T21:11:44Zen
dc.date.issued2001-08en
dc.identifier.urihttp://hdl.handle.net/2152/10780en
dc.descriptiontexten
dc.format.mediumelectronicen
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subjectSemiconductorsen
dc.subjectControl theoryen
dc.titleSimultaneous control and identification for multiple product and process environments in semiconductor manufacturingen
dc.description.departmentChemical Engineeringen
thesis.degree.departmentChemical Engineeringen
thesis.degree.disciplineChemical Engineeringen
thesis.degree.grantorThe University of Texas at Austinen
thesis.degree.levelDoctoralen
thesis.degree.nameDoctor of Philosophyen
dc.rights.restrictionRestricteden


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