Browsing by Subject "Thin films--Thermal properties"
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Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition (2002-05)Abstract – Studies have been done on the materials for alternative gate dielectrics (high-k) and a metal gate electrode, which will replace conventional SiO2 gate dielectric and poly silicon gate electrode, for the ...
(2007)Polymers, by virtue of their chemical composition and molecular architecture, exhibit a diverse range of microstructural features and properties. As thin films, due primarily to effects associated with confinement and ...