Browsing by Subject "Silicon--Industrial applications"
Now showing items 1-3 of 3
(2012-04-10)Silicon based 3D fin structure is believed to be the potential future of current semiconductor technology. However, there are significant challenges still exist in realizing a manufacturable fin based process. In this work, ...
Fabrication of silicon-based nano-structures and their scaling effects on mechanical and electrical properties (2008-08-29)Silicon-based nanostructures are essential building blocks for nanoelectronic devices and nano-electromechanical systems (NEMS), and their mechanical and electrical properties play an important role in controlling the ...