Evaluation and extension of threaded control for high-mix semiconductor manufacturing

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Evaluation and extension of threaded control for high-mix semiconductor manufacturing

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dc.contributor.advisor Flake, Robert H.
dc.contributor.advisor Edgar, Thomas F.
dc.creator Patwardhan, Ninad Narendra
dc.date.accessioned 2011-02-14T20:44:26Z
dc.date.accessioned 2011-02-14T20:44:40Z
dc.date.available 2011-02-14T20:44:26Z
dc.date.available 2011-02-14T20:44:40Z
dc.date.created 2010-12
dc.date.issued 2011-02-14
dc.date.submitted December 2010
dc.identifier.uri http://hdl.handle.net/2152/ETD-UT-2010-12-2097
dc.description.abstract In the recent years threaded run-to-run (RtR) control algorithms have experienced drawbacks under certain circumstances, one such trait is when applied to high-mix of products such as in Application Specific Integrated Circuits (ASIC) foundries. The variations in the process are a function of the product being manufactured as well as the tool being used. The presence of semiconductor layers increases the number of times the lithography process must be repeated. Successive layers having different patterns must be exposed using different reticles/masks in order to maximize tool utilizations. The objectives of this research are to develop a set of methodologies for evaluation and extension of threaded control applied to overlay. This project defines methods to quantify the efficacy of threaded controls, finds the drawbacks of threaded control under production of high mix of semiconductors and suggests extensions and alternatives to improve threaded control. To evaluate the performance of threaded control, extensive simulations were performed in MATLAB. The effects of noise, disturbances, sampling and delays on the control and estimation performance of threaded controller were studied through these simulations. Based on the results obtained, several ideas to extend threaded control by reducing overall number of threads, by improving thread definitions and combination have been introduced. A unique idea of sampling the measurements dynamically based on the estimation accuracy is also presented. Future work includes implementing the extensions to threaded control suggested in this work in real production data and comparing the results without the use of those methods. Future work also includes building new alternatives to threaded control.
dc.format.mimetype application/pdf
dc.language.iso eng
dc.subject Threaded control
dc.subject EWMA
dc.subject Disturbance
dc.subject Noise
dc.subject Estimation
dc.subject MSE
dc.subject Lithography
dc.subject Overlay
dc.subject RtR
dc.subject High-mix
dc.subject Semiconductor manufacturing
dc.subject Process control
dc.title Evaluation and extension of threaded control for high-mix semiconductor manufacturing
dc.date.updated 2011-02-14T20:44:40Z
dc.description.department Electrical and Computer Engineering
dc.type.genre thesis
dc.type.material text
thesis.degree.department Electrical and Computer Engineering
thesis.degree.discipline Electrical and Computer Engineering
thesis.degree.grantor University of Texas at Austin
thesis.degree.level Masters
thesis.degree.name Master of Science in Engineering

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