Computational studies of electron transport and reaction rate models for argon plasma

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Computational studies of electron transport and reaction rate models for argon plasma

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dc.contributor.advisor Raja, Laxminarayan L.
dc.creator Min, Timothy T.
dc.date.accessioned 2010-12-20T17:23:54Z
dc.date.accessioned 2010-12-20T17:24:04Z
dc.date.available 2010-12-20T17:23:54Z
dc.date.available 2010-12-20T17:24:04Z
dc.date.created 2010-08
dc.date.issued 2010-12-20
dc.date.submitted August 2010
dc.identifier.uri http://hdl.handle.net/2152/ETD-UT-2010-08-1877
dc.description.abstract A validation study was performed on a capacitively coupled argon discharge to determine the most suitable models for chemistry and electron transport. Chemical reaction rate and electron transport models choices include equilibrium or non-equilibrium electron EDFs. Experimental studies performed by our collaborative partners in the Colorado School of Mines. Conditions for the studies are 138, 315, and 618 mTorr where the cycle averaged power varied at 20, 50, and 80 Watts in which the voltage supply was driven at 13.56 MHz. Simulations were performed using pressures and voltage used in experiments. The most accurate case was for 138 mTorr at 50 Watts using a non-Maxwellian EDF based chemistry (called Bolsig+ chemistry) and a constant electron momentum transfer cross section of 20 Angstroms which was computed from Boeuf’s paper; this model accurately modeled power deposition to within 2.6%. Furthermore, species number densities, electron temperature, and sheath thicknesses are obtained. Using Bolsig+ chemistry resulted in 20,000K higher electron temperatures than using Arrhenius chemistry rates. Results indicate that power deposition occurs due to electrons gaining energy from the sheath which in turn bombard neutral species producing metastable argon.
dc.format.mimetype application/pdf
dc.language.iso eng
dc.subject Argon
dc.subject Capacitively coupled plasma discharge
dc.subject Modeling
dc.subject Models
dc.subject Glow discharge
dc.subject Electron transport
dc.title Computational studies of electron transport and reaction rate models for argon plasma
dc.date.updated 2010-12-20T17:24:04Z
dc.contributor.committeeMember Hallock, Gary
dc.description.department Aerospace Engineering and Engineering Mechanics
dc.type.genre thesis
dc.type.material text
thesis.degree.department Aerospace Engineering and Engineering Mechanics
thesis.degree.discipline Aerospace Engineering
thesis.degree.grantor University of Texas at Austin
thesis.degree.level Masters
thesis.degree.name Master of Science in Engineering

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