Catalyst diffusion in positive-tone chemically amplified photoresists

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Catalyst diffusion in positive-tone chemically amplified photoresists

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Title: Catalyst diffusion in positive-tone chemically amplified photoresists
Author: Stewart, Michael Dean
Abstract: Not available
Department: Chemical Engineering
Subject: Photoresists Microlithography
URI: http://hdl.handle.net/2152/965
Date: 2003

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