Adaptive run-to-run control of overlay in semiconductor manufacturing

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Adaptive run-to-run control of overlay in semiconductor manufacturing

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dc.contributor.advisor Edgar, Thomas F.
dc.creator Martinez, Victor Manuel
dc.date.accessioned 2008-08-28T21:33:55Z
dc.date.available 2008-08-28T21:33:55Z
dc.date.created 2002
dc.date.issued 2008-08-28T21:33:55Z
dc.identifier.uri http://hdl.handle.net/2152/757
dc.description.abstract Not available
dc.format.medium electronic
dc.language.iso eng
dc.rights Copyright © is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.
dc.subject.lcsh Semiconductors--Design and construction
dc.subject.lcsh Semiconductor industry--Production control
dc.subject.lcsh Electronic packaging
dc.subject.lcsh Production management
dc.title Adaptive run-to-run control of overlay in semiconductor manufacturing
dc.description.department Chemical Engineering
dc.identifier.oclc 56799217
dc.identifier.proqst 3110651
dc.identifier.recnum b57157182
dc.type.genre Thesis
dc.type.material text
thesis.degree.department Chemical Engineering
thesis.degree.discipline Chemical Engineering
thesis.degree.grantor The University of Texas at Austin
thesis.degree.level Doctoral
thesis.degree.name Doctor of Philosophy

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