Adaptive run-to-run control of overlay in semiconductor manufacturing

Repository

dc.contributor.advisor	Edgar, Thomas F.
dc.creator	Martinez, Victor Manuel
dc.date.accessioned	2008-08-28T21:33:55Z
dc.date.available	2008-08-28T21:33:55Z
dc.date.created	2002
dc.date.issued	2008-08-28T21:33:55Z
dc.identifier.uri	http://hdl.handle.net/2152/757
dc.description.abstract	Not available
dc.format.medium	electronic
dc.language.iso	eng
dc.rights	Copyright © is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.
dc.subject.lcsh	Semiconductors--Design and construction
dc.subject.lcsh	Semiconductor industry--Production control
dc.subject.lcsh	Electronic packaging
dc.subject.lcsh	Production management
dc.title	Adaptive run-to-run control of overlay in semiconductor manufacturing
dc.description.department	Chemical Engineering
dc.identifier.oclc	56799217
dc.identifier.proqst	3110651
dc.identifier.recnum	b57157182
dc.type.genre	Thesis
dc.type.material	text
thesis.degree.department	Chemical Engineering
thesis.degree.discipline	Chemical Engineering
thesis.degree.grantor	The University of Texas at Austin
thesis.degree.level	Doctoral
thesis.degree.name	Doctor of Philosophy