| Title: | Characterization of two-dimensional electrostatic potential profiles in deep submicron MOSFET devices |
| Author: | Ko, Kil-soo |
| Abstract: | Not available |
| Department: | Materials Science and Engineering |
| Subject: | Electron holography |
| URI: | http://hdl.handle.net/2152/709 |
| Date: | 2003 |