Nano-scale large area gap control for high throughput electrically induced micro-patterning
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Nano-scale large area gap control for high throughput electrically induced micro-patterning
| Title: | Nano-scale large area gap control for high throughput electrically induced micro-patterning |
| Author: | Raines, Allen Lee, 1973- |
| Abstract: | Not available |
| Department: | Mechanical Engineering |
| Subject: |
Lithography
Microtechnology Nanotechnology |
| URI: | http://hdl.handle.net/2152/3656 |
| Date: | 2007-12 |
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