Nano-scale large area gap control for high throughput electrically induced micro-patterning

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Nano-scale large area gap control for high throughput electrically induced micro-patterning

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Title: Nano-scale large area gap control for high throughput electrically induced micro-patterning
Author: Raines, Allen Lee, 1973-
Abstract: Not available
Department: Mechanical Engineering
Subject: Lithography Microtechnology Nanotechnology
URI: http://hdl.handle.net/2152/3656
Date: 2007-12

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