| Title: | Factors affecting the precision and accuracy of surface temperature measurement using light-pipe radiation thermometers (LPRTs) |
| Author: | Puttitwong, Ekachai |
| Abstract: | Not available |
| Department: | Mechanical Engineering |
| Subject: |
Rapid thermal processing
Semiconductors--Heat treatment |
| URI: | http://hdl.handle.net/2152/3475 |
| Date: | 2006 |