Advanced lithographic patterning technologies: materials and processes
| Title: | Advanced lithographic patterning technologies: materials and processes |
| Author: | Taylor, James Christopher |
| Abstract: | Not available |
| Department: | Chemical Engineering |
| Subject: |
Lithography
Photoresists Photonic crystals |
| URI: | http://hdl.handle.net/2152/3040 |
| Date: | 2007 |
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