Advanced lithographic patterning technologies: materials and processes

Repository

Advanced lithographic patterning technologies: materials and processes

Show full record

Title: Advanced lithographic patterning technologies: materials and processes
Author: Taylor, James Christopher
Abstract: Not available
Department: Chemical Engineering
Subject: Lithography Photoresists Photonic crystals
URI: http://hdl.handle.net/2152/3040
Date: 2007

Files in this work

Download File: taylorj05728.pdf
Size: 2.999Mb
Format: application/pdf

This work appears in the following Collection(s)

Show full record


Advanced Search

Browse

My Account

Statistics

Information