Design and fabrication of sub-millimeter scale gas bearings with tungsten-containing diamond like carbon coatings
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Design and fabrication of sub-millimeter scale gas bearings with tungsten-containing diamond like carbon coatings
| Title: | Design and fabrication of sub-millimeter scale gas bearings with tungsten-containing diamond like carbon coatings |
| Author: | Kim, Daejong |
| Abstract: | Not available |
| Department: | Mechanical Engineering |
| Subject: |
Gas-lubricated bearings--Design and construction
Nickel-plating X-ray lithography Coatings Tungsten compounds Carbon compounds |
| URI: | http://hdl.handle.net/2152/2039 |
| Date: | 2004 |
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