Dynamics of defects and dopants in complex systems: si and oxide surfaces and interfaces

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Dynamics of defects and dopants in complex systems: si and oxide surfaces and interfaces

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Title: Dynamics of defects and dopants in complex systems: si and oxide surfaces and interfaces
Author: Kirichenko, Taras Alexandrovich
Abstract: Not available
Department: Electrical and Computer Engineering
Subject: Silicon oxide films Semiconductors--Defects Silicon crystals--Analysis
URI: http://hdl.handle.net/2152/1785
Date: 2005

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