Deposition and characterization of thin films for applications in ULSI fabrication
| Title: | Deposition and characterization of thin films for applications in ULSI fabrication |
| Author: | Wang, Qi |
| Abstract: | Not available |
| Department: | Chemical Engineering |
| Subject: |
Integrated circuits--Ultra large scale integration--Materials
Thin films |
| URI: | http://hdl.handle.net/2152/1432 |
| Date: | 2004 |
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