Deposition and characterization of thin films for applications in ULSI fabrication

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Deposition and characterization of thin films for applications in ULSI fabrication

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Title: Deposition and characterization of thin films for applications in ULSI fabrication
Author: Wang, Qi
Abstract: Not available
Department: Chemical Engineering
Subject: Integrated circuits--Ultra large scale integration--Materials Thin films
URI: http://hdl.handle.net/2152/1432
Date: 2004

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