Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials
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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials
| Title: | Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials |
| Author: | Osborn, Brian Philip |
| Abstract: | Not available |
| Department: |
Chemistry
Chemistry and Biochemistry |
| Subject: |
Photolithography
Vacuum ultraviolet spectroscopy Photoresists |
| URI: | http://hdl.handle.net/2152/1381 |
| Date: | 2004 |
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