Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

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Title: Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials
Author: Osborn, Brian Philip
Abstract: Not available
Department: Chemistry Chemistry and Biochemistry
Subject: Photolithography Vacuum ultraviolet spectroscopy Photoresists
URI: http://hdl.handle.net/2152/1381
Date: 2004

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