Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces

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Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces

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Title: Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces
Author: Schaeffer, James Kenyon
Abstract: Not available
Department: Materials Science and Engineering
Subject: Hafnium oxide Dielectrics Electrodes Metal oxide semiconductor field-effect transistors
URI: http://hdl.handle.net/2152/1258
Date: 2004

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