Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces
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Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces
| Title: | Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces |
| Author: | Schaeffer, James Kenyon |
| Abstract: | Not available |
| Department: | Materials Science and Engineering |
| Subject: |
Hafnium oxide
Dielectrics Electrodes Metal oxide semiconductor field-effect transistors |
| URI: | http://hdl.handle.net/2152/1258 |
| Date: | 2004 |
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