The stability and performance of the EWMA and double-EWMA run-to-run controllers with metrology delay

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The stability and performance of the EWMA and double-EWMA run-to-run controllers with metrology delay

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Title: The stability and performance of the EWMA and double-EWMA run-to-run controllers with metrology delay
Author: Good, Richard Paul
Abstract: Not available
Department: Chemical Engineering
Subject: Semiconductor industry--Production control Semiconductor industry--Quality control Semiconductors--Design and construction Process control
URI: http://hdl.handle.net/2152/1167
Date: 2004

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