Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes
Repository
Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes
| Title: | Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes |
| Author: | Firsth, Stacy Kay |
| Abstract: | Not available |
| Department: | Chemical Engineering |
| Subject: |
Semiconductors--Design and construction
Semiconductor industry--Production control |
| URI: | http://hdl.handle.net/2152/11384 |
| Date: | 2002-12 |
Files in this work
This work appears in the following Collection(s)
-
UT Electronic Theses and Dissertations
ETD is a collection of UT Austin authored electronic dissertations.