Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes

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Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes

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Title: Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes
Author: Firsth, Stacy Kay
Abstract: Not available
Department: Chemical Engineering
Subject: Semiconductors--Design and construction Semiconductor industry--Production control
URI: http://hdl.handle.net/2152/11384
Date: 2002-12

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