Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition
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Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition
| Title: | Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition |
| Author: | Taek Soo, Jeon |
| Abstract: | Not available |
| Department: | Materials Science and Engineering |
| Subject: |
Thin films--Thermal properties
Chemical vapor deposition |
| URI: | http://hdl.handle.net/2152/11017 |
| Date: | 2002-05 |
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