Three-dimensional Monte Carlo simulation of ion implantation
| Title: | Three-dimensional Monte Carlo simulation of ion implantation |
| Author: | Li, Di |
| Abstract: | Not available |
| Department: | Electrical and Computer Engineering |
| Subject: |
Ion implantation--Computer simulation
Monte Carlo method |
| URI: | http://hdl.handle.net/2152/1101 |
| Date: | 2002 |
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