Monte Carlo simulation of MeV ion implantation with computationally efficient models
| Title: | Monte Carlo simulation of MeV ion implantation with computationally efficient models |
| Author: | Wang, Greg |
| Abstract: | Not available |
| Department: | Electrical and Computer Engineering |
| Subject: |
Ion implantation--Computer simulation
Monte Carlo method |
| URI: | http://hdl.handle.net/2152/10872 |
| Date: | 2001-08 |
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