Monte Carlo simulation of MeV ion implantation with computationally efficient models

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Monte Carlo simulation of MeV ion implantation with computationally efficient models

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Title: Monte Carlo simulation of MeV ion implantation with computationally efficient models
Author: Wang, Greg
Abstract: Not available
Department: Electrical and Computer Engineering
Subject: Ion implantation--Computer simulation Monte Carlo method
URI: http://hdl.handle.net/2152/10872
Date: 2001-08

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