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| Thermal stress behaviors of Al(Cu)/low-k and Cu/low-k submicron interconnect structures | 241 |
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| November 2012 | December 2012 | January 2013 | February 2013 | March 2013 | April 2013 | May 2013 | |
| Thermal stress behaviors of Al(Cu)/low-k and Cu/low-k submicron interconnect structures | 20 | 9 | 11 | 14 | 28 | 28 | 19 |
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