Thermomechanical stress studies for advanced copper metallization and integration
| Title: | Thermomechanical stress studies for advanced copper metallization and integration |
| Author: | Du, Yong |
| Abstract: | Not available |
| Department: | Materials Science and Engineering |
| Subject: | Copper--Thermal fatigue |
| URI: | http://hdl.handle.net/2152/10429 |
| Date: | 2001-08 |
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