Thermomechanical stress studies for advanced copper metallization and integration

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Thermomechanical stress studies for advanced copper metallization and integration

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Title: Thermomechanical stress studies for advanced copper metallization and integration
Author: Du, Yong
Abstract: Not available
Department: Materials Science and Engineering
Subject: Copper--Thermal fatigue
URI: http://hdl.handle.net/2152/10429
Date: 2001-08

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