Synthesis, copolymerization studies and 157 nm photolithography applications of 2-trifluoromethylacrylates
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Synthesis, copolymerization studies and 157 nm photolithography applications of 2-trifluoromethylacrylates
| Title: | Synthesis, copolymerization studies and 157 nm photolithography applications of 2-trifluoromethylacrylates |
| Author: | Trinque, Brian C. |
| Abstract: | Not available |
| Department: |
Chemistry
Chemistry and Biochemistry |
| Subject: |
Polymers
Photolithography |
| URI: | http://hdl.handle.net/2152/1012 |
| Date: | 2003 |
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